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hal-01867595
v1
Conference papers
Éric Imbernon
,
Emmanuel Scheid
,
Françoise Rossel
,
Marie Breil
,
H Carrière
et al.
RÉALISATION DE MURS P + TRAVERSANTS POUR DES FONCTIONS DE PUISSANCE INTÉGRÉES
Seminario Annual de Automatica, Electronica Industrial e Instrumentacion. Electronique de Puissance du Futur (SAAEI-EPF'04)
, Sep 2004, Toulouse, France. 4p
hal-01753123
v1
Journal articles
Gulaim Seisenbaeva
,
Suresh Gohil
,
Vadim Kessler
,
Michel Andrieux
,
Corinne Legros
et al.
Controlling precursor stability and evaporation through molecular design. Pseudo single source precursor approach to MOCVD SrTiO3 thin films
Applied Surface Science
, Elsevier, 2011, 257 (6), pp.2281 - 2290.
⟨10.1016/j.apsusc.2010.09.090⟩
hal-02396239
v1
Journal articles
Georgios Gakis
,
Constantin Vahlas
,
Hugues Vergnes
,
Sandrine Dourdain
,
Yann Tison
et al.
Investigation of the initial deposition steps and the interfacial layer of Atomic Layer Deposited (ALD) Al 2 O 3 on Si
Applied Surface Science
, Elsevier, 2019, 492, pp.245 - 254.
⟨10.1016/j.apsusc.2019.06.215⟩
hal-01730674
v1
Preprints, Working Papers, ...
Richard Daubriac
,
Emmanuel Scheid
,
S. Joblot
,
R. Beneyton
,
P Acosta Alba
et al.
A Differential Hall Effect method with sub-nanometre resolution for active dopant concentration profiling in ultra-thin Si 1-x Ge x and Si doped layers
2018
hal-01730196
v1
Journal articles
Giorgos Gakis
,
Hugues Vergnes
,
Emmanuel Scheid
,
Constantin Vahlas
,
Brigitte Caussat
et al.
Computational fluid dynamics simulation of the ALD of alumina from TMA and H2O in a commercial reactor
Chemical Engineering Research and Design
, Elsevier, 2018, 132, pp.795-811.
⟨10.1016/j.cherd.2018.02.031⟩
hal-02329135
v1
Journal articles
Georgios Gakis
,
Hugues Vergnes
,
Emmanuel Scheid
,
Constantin Vahlas
,
Andreas Boudouvis
et al.
Detailed investigation of the surface mechanisms and their interplay with transport phenomena in alumina atomic layer deposition from TMA and water
Chemical Engineering Science
, Elsevier, 2019, 195, pp.399-412.
⟨10.1016/j.ces.2018.09.037⟩
hal-02099873
v2
Conference papers
P. Yoboué
,
Philippe Menini
,
Habib Chalabi
,
Véronique Conédéra
,
Ludovic Salvagnac
et al.
Development of a Micro-hotplate for different Metal Oxide Gas Sensors with High Operating Temperatures
MICROMECHANICS EUROPE 2007
, Sep 2007, Guimaraes, Portugal. pp.191-194
hal-01735436
v1
Conference papers
Richard Daubriac
,
Emmanuel Scheid
,
S. Joblot
,
R. Beneyton
,
P Acosta Alba
et al.
Dopant Activation in Ultra-thin SiGeOI and SOI layers characterised by Differential Hall Effect
Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon
, Mar 2018, Grenade, Spain
hal-01871410
v1
Conference papers
Ahmet Lale
,
Auriane Grappin
,
Emmanuel Scheid
,
Jérôme Launay
,
Pierre Temple-Boyer
.
Design, realization and characterization of silicon nanowire ion sensitive field effect transistors
IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2016
, Oct 2016, Toulouse, France. 2p.,
⟨10.1109/NMDC.2016.7777159⟩
hal-02087150
v1
Conference papers
H. Chalabi
,
Philippe Menini
,
Emmanuel Scheid
,
Ludovic Salvagnac
,
Véronique Conédéra
et al.
Development of integrated smart nose based on WO3 gas sensors
Eurosensors XX
, Sep 2006, Göteborg, Sweden
hal-01511365
v2
Journal articles
Pierre Temple-Boyer
,
Bernard Rousset
,
Emmanuel Scheid
.
Influences of deposition and crystallization kinetics on the properties of silicon films deposited by low-pressure chemical vapour deposition from silane and disilane
Thin Solid Films
, Elsevier, 2010, 518 (23), pp.6897-6903.
⟨10.1016/j.tsf.2010.07.037⟩
hal-01922678
v1
Journal articles
E. Bazizi
,
A. Pakfar
,
P Fazzini
,
Fuccio Cristiano
,
C. Tavernier
et al.
Transfer of physically-based models from process to device simulations: Application to advanced SOI MOSFETs
Thin Solid Films
, Elsevier, 2010, 518 (9), pp.2427 - 2430.
⟨10.1016/j.tsf.2009.09.141⟩
hal-02043421
v1
Journal articles
Ahmet Lale
,
Emmanuel Scheid
,
Fuccio Cristiano
,
Lucien Datas
,
Benjamin Reig
et al.
Study of aluminium oxide thin films deposited by plasma-enhanced atomic layer deposition from tri-methyl-aluminium and dioxygen precursors: investigation of interfacial and structural properties
Thin Solid Films
, Elsevier, 2018, 666, pp.20 - 27.
⟨10.1016/j.tsf.2018.09.028⟩
hal-01921179
v1
Journal articles
Richard Daubriac
,
Emmanuel Scheid
,
Hiba Rizk
,
Richard Monflier
,
Sylvain Joblot
et al.
A differential Hall effect measurement method with sub-nanometre resolution for active dopant concentration profiling in ultrathin doped Si 1− x Ge x and Si layers
Beilstein Journal of Nanotechnology
, Karlsruhe Institute of Technology., 2018, 9, pp.1926 - 1939.
⟨10.3762/bjnano.9.184⟩
hal-02983939
v1
Journal articles
L. Dagault
,
S. Kerdilès
,
P Acosta-Alba
,
J.-M. Hartmann
,
J.-P. Barnes
et al.
Investigation of recrystallization and stress relaxation in nanosecond laser annealed Si 1−x Ge x /Si epilayers
Applied Surface Science
, Elsevier, 2020, 527, pp.146752.
⟨10.1016/j.apsusc.2020.146752⟩
hal-03098053
v1
Preprints, Working Papers, ...
Richard Monflier
,
Toshiyuki Tabata
,
Hiba Rizk
,
Julien Roul
,
Karim Huet
et al.
Investigation of Oxygen penetration during UV Nanosecond Laser Annealing of Silicon at high energy densities
2021
hal-01745028
v1
Journal articles
Karolina Galicka-Fau
,
Michel Andrieux
,
Corinne Legros
,
Michaële Herbst-Ghysel
,
Isabelle Gallet
et al.
ZrO2 Thin Films Grown On 2D and 3D Silicon Surfaces By DLI-MOCVD For Electronic Devices
ECS Transactions
, Electrochemical Society, Inc., 2009, 25 (8), pp.1121-1128.
⟨10.1149/1.3207715⟩
hal-01443083
v1
Journal articles
Magali Brunet
,
Hicham Mafhoz Kotb
,
Laurent Bouscayrol
,
Emmanuel Scheid
,
Michel Andrieux
et al.
Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors
Thin Solid Films
, Elsevier, 2011, 519 (16), pp.5638-5644.
⟨10.1016/j.tsf.2011.03.006⟩
hal-01443057
v1
Journal articles
Magali Brunet
,
Emmanuel Scheid
,
Karolina Galicka-Fau
,
Michel Andrieux
,
Corinne Legros
et al.
Characterization of ZrO2 thin films deposited by MOCVD for high-density 3D capacitors. Broad experience on MOCVD techniques and high-k materials
Microelectronic Engineering
, Elsevier, 2009, 86 (10), pp.2034-2037.
⟨10.1016/j.mee.2009.01.034⟩
hal-01730652
v1
Conference papers
Richard Daubriac
,
Mahmoud Abou Daher
,
Fuccio Cristano
,
Emmanuel Scheid
,
S. Joblot
et al.
Differential hall characterization of shallow strained SiGe layers
2016 IEEE Nanotechnology Materials and Devices Conference (NMDC)
, Oct 2016, Toulouse, France.
⟨10.1109/NMDC.2016.7777082⟩
hal-02396236
v1
Journal articles
Georgios Gakis
,
Hugues Vergnes
,
Fuccio Cristiano
,
Yann Tison
,
Constantin Vahlas
et al.
Ιn situ N 2 -NH 3 plasma pre-treatment of silicon substrate enhances the initial growth and restricts the substrate oxidation during alumina ALD
Journal of Applied Physics
, American Institute of Physics, 2019, 126 (12), pp.125305.
⟨10.1063/1.5113755⟩
hal-01719500
v1
Journal articles
François-Xavier Darras
,
Nikolay Cherkashin
,
Fuccio Cristiano
,
Emmanuel Scheid
,
Oleg Kononchuk
et al.
Quantification of the number of Si interstitials formed by hydrogen implantation in silicon using boron marker layers
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
, Elsevier, 2014, 327 (1), pp.29-32.
⟨10.1016/j.nimb.2013.09.045⟩
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