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hal-01391501v1  Conference papers
Antoine NaillonHajar MassadiRémi CoursonPierre-François CalmonLucie Seveno et al.  GRAYSCALE LITHOGRAPHY TO FABRICATE VARYING-DEPTH NANOCHANNELS IN A SINGLE STEP
The 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS, CBMS, Oct 2016, Dublin, Ireland