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hal-01102974
v1
Conference papers
Sylvain Noblecourt
,
Josiane Tasselli
,
Frédéric Morancho
,
Karine Isoird
,
Patrick Austin
et al.
Optimisation de la diode à Superjonction à tranchées profondes pour des applications à 600V
Symposium de Génie Electrique 2014
, Jul 2014, Cachan, France
hal-01002269
v1
Conference papers
Hicham Mahfoz-Kotb
,
Loïc Théolier
,
Frédéric Morancho
,
Karine Isoird
,
Pascal Dubreuil
et al.
Étude de faisabilité d'une terminaison de jonction basée sur des tranchées profondes pour des composants haute tension (1200 V)
XIIème colloque Electronique de Puissance du Futur (EPF 2008)
, Jul 2008, TOURS, France. 4 p
hal-01556263
v1
Conference papers
Sabry Khalfallah
,
Pascal Dubreuil
,
Laurent Escotte
,
Chantal Fontaine
,
A. Muñoz-Yagüe
et al.
III-V Semiconductor Integrated (De)Modulators/Multiplexers for coherence multiplexed sensor networks
10th international conference on solid-state sensors and actuators
, 1999, Sendaï, Japan
hal-01556269
v1
Conference papers
Sabry Khalfallah
,
Pascal Dubreuil
,
Laurent Escotte
,
René Legros
,
Chantal Fontaine
et al.
Modulateur de cohérence intégré en GaAlAs sur GaAs au réseau de capteurs
7ème Journées Nationales de Microélectronique et Optoélectronique
, Jan 1999, Egat, France
hal-01556253
v1
Journal articles
Sabry Khalfallah
,
Pascal Dubreuil
,
Laurent Escotte
,
René Legros
,
Chantal Fontaine
et al.
A GaAlAs-GaAs integrated coherence modulator
Journal of Lightwave Technology
, Institute of Electrical and Electronics Engineers (IEEE)/Optical Society of America(OSA), 1999, 17 (1), pp.103-107.
⟨10.1109/50.737428⟩
hal-01955633
v1
Journal articles
Sylvain Noblecourt
,
Josiane Tasselli
,
Frédéric Morancho
,
Karine Isoird
,
Patrick Austin
et al.
Optimisation de la diode à Superjonction à tranchées profondes pour des applications à 600V
European Journal of Electrical Engineering
, Lavoisier, 2014, 17 (5-6), pp.345-361.
⟨10.3166/ejee.17.345-361⟩
hal-01857634
v1
Conference papers
Ludovic Marigo-Lombart
,
Alexandre Arnoult
,
Laurent Mazenq
,
Pascal Dubreuil
,
Benjamin Reig
et al.
VCSELs fabricated using self-aligned processing
Workshop VCSEL Day 2016
, Jun 2016, Darmstadt, Germany. 2p
hal-01557033
v1
Conference papers
Sabry Khalfallah
,
Pascal Dubreuil
,
Laurent Escotte
,
René Legros
,
Chantal Fontaine
et al.
Nouveau modulateur de cohérence intégré en AlGaAs/GaAs : Interféromètre de Mach-Zehnder fortement déséquilibré
Journées Nationales de l’Optique Guidée, JNOG
, Oct 1998, Marly-le-Roy, France. pp.87-89
hal-01557042
v1
Conference papers
Sabry Khalfallah
,
Pascal Dubreuil
,
Laurent Escotte
,
René Legros
,
Chantal Fontaine
et al.
Modulateur de cohérence intégré en AlGaAs/GaAs
Journées Nationales de l’Optique Guidée, JNOG
, Nov 1997, St Etienne, France. pp.196-198
hal-01857638
v1
Poster communications
Ludovic Marigo-Lombart
,
Alexandre Arnoult
,
Laurent Mazenq
,
Pascal Dubreuil
,
Jean-Baptiste Doucet
et al.
Développement de briques technologiques pour la fabrication d’un VCSEL avec un modulateur intégré verticalement
15eme Journees Nano, Micro et Optoelectronique (JNMO)
, May 2016, Les Issambres, France. 2016
hal-01857636
v1
Conference papers
Ludovic Marigo-Lombart
,
Laurent Mazenq
,
Ludovic Salvagnac
,
Guillaume Libaude
,
Bernard Rousset
et al.
VCSELs fabricated using self-aligned processing
42nd Micro and Nano Engineering (MNE)
, Sep 2016, Vienna, Austria
hal-01326492
v1
Conference papers
Aurélie Lecestre
,
Aziliz Lecomte
,
David Bourrier
,
Pascal Dubreuil
,
Emeline Descamps
et al.
Plasma etching of thick Parylene C for fabrication of biocompatible electrodes
9th Workshop on Plasma Etch and Strip in Microtechnology (PESM2016)
, May 2016, Grenoble, France
hal-01415368
v1
Conference papers
Aurélie Lecestre
,
Pascal Dubreuil
,
Youssouf Guerfi
,
Franck Carcenac
,
Romain Cipro
et al.
Fabrication de réseaux de nanofils verticaux de GaAs sur substrat en Si(100) par une approche descendante
GDR Nanofils 2014
, Oct 2014, Toulouse, France. pp.189 - 192
hal-02066017
v1
Other reports
Pascal Dubreuil
,
David Quirion
.
Mise au point d'un procédé de gravure d'aluminium sur oxyde de silicium dans la plateforme de micro et nanotechnologies du LAAS-CNRS
Rapport LAAS n° 19087. 2019
hal-02137930
v1
Other reports
Hugues Granier
,
Pierre-François Calmon
,
Franck Carcenac
,
Véronique Conédéra
,
Monique Dilhan
et al.
Bilan 2018 des activités de la centrale de micro et nanotechnologies du LAAS-CNRS et du service TEAM
Rapport LAAS n° 19151. 2019
hal-01810344
v1
Conference papers
Pierre Joseph
,
Fabien Chauvet
,
Pascal Dubreuil
,
Antoine Naillon
.
Imbibition and evaporation in model nanofluidic systems
CECAM conference “Nanofluidics in physics and biology” EPFL
, Oct 2014, Lausanne, Switzerland
hal-01485548
v1
Other reports
Hugues Granier
,
Véronique Conédéra
,
Monique Dilhan
,
Franck Carcenac
,
Pierre-François Calmon
et al.
Bilan des activités de la plateforme de micro et nano technologies du LAAS-CNRS
Rapport LAAS n° 17056. 2017
hal-01874765
v1
Conference papers
Fadhila Sekli Belaïdi
,
William Tiddi
,
Matthieu Polverel
,
Gabriel Lemercier
,
Aurélie Lecestre
et al.
Integration of ring nanoelectrodes into microwell for the bioelectrochemical analysis in sub-picoliter volumes
18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2015)
, Jun 2015, Anchorage, AK, United States. 4p.,
⟨10.1109/TRANSDUCERS.2015.7181224⟩
hal-01767583
v1
Other reports
Hugues Granier
,
Alexandre Arnoult
,
David Bourrier
,
Laurent Bouscayrol
,
Pierre-François Calmon
et al.
Un bilan des activités 2017 de la plateforme de micro et nanotechnologies du LAAS-CNRS
Rapport LAAS n° 18107. 2018
hal-01054251
v1
Conference papers
Aurélie Lecestre
,
Pascal Dubreuil
,
Sylvain Noblecourt
,
Josiane Tasselli
,
Éric Imbernon
et al.
Anisotropic Deep Reactive Ion Etching without Aspect Ratio Dependence Etching for silicon power devices
PESM 2014 (Plasma Etch and Strip in Microtechnology)
, May 2014, Grenoble, France. 2p
hal-01102388
v1
Conference papers
Brice Adelin
,
Alexandre Larrue
,
Aurélie Lecestre
,
Pascal Dubreuil
,
Yves Rouillard
et al.
High aspect ratio deep etching in GaInAsSb/AlGaAsSb system by ICP-RIE plasma
Plasma Etch and Strip in Microtechnology ( PESM ) 2014
, May 2014, Grenoble, France
hal-01102417
v1
Conference papers
Brice Adelin
,
Quentin Gaimard
,
Alexandre Larrue
,
Aurélie Lecestre
,
Pascal Dubreuil
et al.
Dry Etching of High [Al] AlGaAsSb Compounds Using Cl 2 /N 2 /Ar ICP RIE
International Conference on Micro and Nano Engineering ( MNE ) 2014
, Sep 2014, Lausanne, Switzerland
hal-01917558
v1
Conference papers
Léopold Macé
,
Olivier Gauthier-Lafaye
,
Antoine Monmayrant
,
Henri Camon
,
Pascal Dubreuil
et al.
Fabrication of Doubly-Corrugated Zero-Contrast-Grating for Broadband Pixelated Filtering in the Mid-IR Range
20th International Conference on Transparent Optical Networks (ICTON 2018)
, Jul 2018, Bucharest, Romania
hal-01867464
v1
Other reports
Hugues Granier
,
Adrian Laborde
,
Alexandre Arnoult
,
Antoine Maiorano
,
Aurélie Lecestre
et al.
Bilan 2014 des zones de la plateforme de micro et nanotechnologies
Rapport LAAS n°15168. 2015, 105p
hal-01867458
v1
Other reports
Hugues Granier
,
Alexandre Arnoult
,
David Bourrier
,
Laurent Bouscayrol
,
Pierre-François Calmon
et al.
Protocole d'arrêt général de la plateforme de micro et nanotechnologies du LAAS-CNRS
Rapport LAAS n° 14267. 2014
hal-01867462
v1
Other reports
Hugues Granier
,
Adrian Laborde
,
Alexandre Arnoult
,
Antoine Maiorano
,
Aurélie Lecestre
et al.
Bilan 2015 des activités de la plateforme de micro et nano technologies du LAAS-CNRS
Rapport LAAS n° 16053. 2016
hal-01867468
v1
Other reports
Hugues Granier
,
Adrian Laborde
,
Alexandre Arnoult
,
Antoine Maiorano
,
Aurélie Lecestre
et al.
Plate forme de micro et nanotechnologies Bilan 2013 des zones
Rapport LAAS n° 14772. 2014, 108p
hal-01867595
v1
Conference papers
Éric Imbernon
,
Emmanuel Scheid
,
Françoise Rossel
,
Marie Breil
,
H Carrière
et al.
RÉALISATION DE MURS P + TRAVERSANTS POUR DES FONCTIONS DE PUISSANCE INTÉGRÉES
Seminario Annual de Automatica, Electronica Industrial e Instrumentacion. Electronique de Puissance du Futur (SAAEI-EPF'04)
, Sep 2004, Toulouse, France. 4p
hal-01626954
v1
Journal articles
Brice Adelin
,
Olivier Gauthier-Lafaye
,
Pascal Dubreuil
,
Aurélie Lecestre
,
Yves Rouillard
et al.
Electrically pumped all photonic crystal 2 nd order DFB lasers arrays emitting at 2.3 μ m
APL Photonics
, AIP Publishing LLC, 2017, 2 (3), pp.036105.
⟨10.1063/1.4978665⟩
hal-01330934
v1
Conference papers
Aurélie Lecestre
,
Pascal Dubreuil
,
Nicolas Mallet
,
Franck Carcenac
,
Romain Cipro
et al.
Gravure de nanofils GaAs sur substrat Si(100) pour l'intégration de nano-transistors 3D
15èmes Journées Nano, Micro et Optoélectronique (JNMO 2016)
, May 2016, Les Issambres, France
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