Search - Université Toulouse III - Paul Sabatier

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	hal-01736106v1 Conference papers S. Paul, W. Lerch, Xavier Hebras, Nikolay Cherkashin, Fuccio Cristiano. Activation, diffusion and defect analysis of a spike anneal thermal cycle Symposium C – Silicon Front-End Junction Formation-Physics and Technology, 2004, indéterminée, Unknown Region. pp.215-221, ⟨10.1557/PROC-810-C5.4⟩
	hal-01736104v1 Journal articles Silke Paul, Wilfried Lerch, Xavier Hebras, Nikolay Cherkashin, Fuccio Cristiano. Activation, Diffusion and Defect Analysis of a Spike Anneal Thermal Cycle MRS Proceedings, 2004, 810, ⟨10.1557/proc-810-c5.4⟩
	hal-01736096v1 Journal articles Fuccio Cristiano, Nikolay Cherkashin, P. Calvo, Y. Lamrani, Xavier Hebras et al. Thermal stability of boron electrical activation in preamorphised ultra-shallow junctions Materials Science and Engineering B: Solid-State Materials for Advanced Technology, Elsevier, 2004, 114-115 (SPEC. ISS.), pp.174-179. ⟨10.1016/j.mseb.2004.07.049⟩
	hal-01736121v1 Journal articles B. Bayha, S. Paul, W. Lerch, D.F. Downey, E.A. Arevalo et al. Dependence of junction depth and sheet resistance on the thermal budget in the low temperature pre-stabilization regime Proceedings of the International Conference on Ion Implantation Technology, 2002, 22-27-September-2002, pp.618-621. ⟨10.1109/IIT.2002.1258081⟩
	hal-01736115v1 Journal articles Fuccio Cristiano, Xavier Hebras, Nikolay Cherkashin, Alain Claverie, W. Lerch et al. Clusters formation in ultralow-energy high-dose boron-implanted silicon Applied Physics Letters, American Institute of Physics, 2003, 83 (26), pp.5407-5409. ⟨10.1063/1.1637440⟩
	hal-01736070v1 Journal articles Xavier Hebras, P. Nguyen, K.K. Bourdelle, F. Letertre, Nikolay Cherkashin et al. Comparison of platelet formation in hydrogen and helium-implanted silicon Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 2007, 262 (1), pp.24-28. ⟨10.1016/j.nimb.2007.04.158⟩
	hal-01736101v1 Journal articles Fuccio Cristiano, Nikolay Cherkashin, Xavier Hebras, P. Calvo, Y. Lamrani et al. Ion beam induced defects in crystalline silicon Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 2004, 216 (1-4), pp.46-56. ⟨10.1016/j.nimb.2003.11.019⟩
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