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hal-01962426v1  Conference papers
Cécile FuinelFabrice MathieuAdrian LabordeLaurent MazenqChristian Bergaud et al.  High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration
19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩
hal-01850513v1  Conference papers
Pascal BelaubreM. GuirardelVéronique Le BerreA. DagkessamanskaiaE. Trevisiol et al.  Silicon-based microcantilevers for multiple biological sample deposition
IEEE International Solid-State Sensors and Actuators Conference, Jun 2003, Boston, United States. pp.1816-1819, ⟨10.1109/SENSOR.2003.1217140⟩
hal-01764277v1  Conference papers
Christian BergaudAiva SimaiteBertrand TonduFabrice MathieuPhilippe Souères. Simple casting based fabrication of PEDOT:PSS-PVDF-ionic liquid soft actuators
SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, Mar 2015, San Diego, United States. ⟨10.1117/12.2083936⟩
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hal-01849240v1  Journal articles
Pascal BelaubreM. GuirardelGermain GarciaJean Bernard PourcielVéronique Le Berre et al.  Fabrication of biological microarrays using microcantilevers
Applied Physics Letters, American Institute of Physics, 2003, 82 (18), pp.3122 - 3124. ⟨10.1063/1.1565685⟩
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hal-01326492v1  Conference papers
Aurélie LecestreAziliz LecomteDavid BourrierPascal DubreuilEmeline Descamps et al.  Plasma etching of thick Parylene C for fabrication of biocompatible electrodes
9th Workshop on Plasma Etch and Strip in Microtechnology (PESM2016), May 2016, Grenoble, France
hal-01976995v1  Book sections
Ali MazizAiva SimaiteChristian Bergaud. Ionic Electrochemical Actuators
Polymerized Ionic Liquids, Royal Society of Chemistry, Royal Society of Chemistry, pp.456-488, 2017, 978-1-78262-960-3