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tel-00146678
v1
Theses
Hugues Granier
.
Optimisation technologique des transistors bipolaires hyperfréquence de puissance à hétérojonction GaAs/GaAlAs
Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 1995. Français
hal-01911255
v1
Other reports
Julien Joneau
,
Laurent Mazenq
,
Séverine Vivies
,
Adrian Laborde
,
Hugues Granier
.
Mise au point de procédés de lithographie UV sur l'équipement Suss Microtec MA-BA6 Gen4
Rapport LAAS n° 18348. 2018
hal-02572420
v1
Reports
Séverine Vivies
,
Adrian Laborde
,
Julien Joneau
,
Laurent Mazenq
,
Hugues Granier
.
Mise au point d'un dépôt HMDS sur la plaque OBDUCAT QS V 200 BM
[Rapport Technique] LAAS-CNRS. 2018
hal-01485548
v1
Other reports
Hugues Granier
,
Véronique Conédéra
,
Monique Dilhan
,
Franck Carcenac
,
Pierre-François Calmon
et al.
Bilan des activités de la plateforme de micro et nano technologies du LAAS-CNRS
Rapport LAAS n° 17056. 2017
hal-02137930
v1
Other reports
Hugues Granier
,
Pierre-François Calmon
,
Franck Carcenac
,
Véronique Conédéra
,
Monique Dilhan
et al.
Bilan 2018 des activités de la centrale de micro et nanotechnologies du LAAS-CNRS et du service TEAM
Rapport LAAS n° 19151. 2019
hal-01767583
v1
Other reports
Hugues Granier
,
Alexandre Arnoult
,
David Bourrier
,
Laurent Bouscayrol
,
Pierre-François Calmon
et al.
Un bilan des activités 2017 de la plateforme de micro et nanotechnologies du LAAS-CNRS
Rapport LAAS n° 18107. 2018
hal-01867464
v1
Other reports
Hugues Granier
,
Adrian Laborde
,
Alexandre Arnoult
,
Antoine Maiorano
,
Aurélie Lecestre
et al.
Bilan 2014 des zones de la plateforme de micro et nanotechnologies
Rapport LAAS n°15168. 2015, 105p
hal-01867458
v1
Other reports
Hugues Granier
,
Alexandre Arnoult
,
David Bourrier
,
Laurent Bouscayrol
,
Pierre-François Calmon
et al.
Protocole d'arrêt général de la plateforme de micro et nanotechnologies du LAAS-CNRS
Rapport LAAS n° 14267. 2014
hal-02285816
v1
Reports
Ludovic Salvagnac
,
Hugues Granier
,
Séverine Vivies
,
Véronique Conédéra
.
Suivi de la réalisation du projet Thermie au 30 juin 2018
Région Occitanie. 2018
hal-01542690
v2
Reports
Quentin Gravelier
,
Alexandre Arnoult
,
Guy Lacoste
,
Hugues Granier
.
Notice Technique : Procédure d'entrée de molybloc dans la chambre d'introduction réacteurs MBE 32 et MBE 2300
[Rapport Technique] Rapport LAAS n° 17205, LAAS-CNRS. 2017, 10p
hal-01542655
v2
Reports
Quentin Gravelier
,
Alexandre Arnoult
,
Guy Lacoste
,
Hugues Granier
.
Notice Technique : Procédure de sortie de molybloc de la chambre d'introduction réacteurs MBE 32 et MBE 2300
[Rapport Technique] Rapport LAAS n° 17207, LAAS-CNRS. 2017
hal-02159848
v1
Conference papers
Hugues Granier
,
Monique Dilhan
.
Auditable invoicing of audited rates: a methodology for funding of an academic platform operations
European Nanofabrication Research Infrastrcutures Symposium
, Jun 2019, Erschende, Netherlands
hal-00385958
v1
Conference papers
Isabelle Bertrand
,
Vasanta Pathirana
,
Éric Imbernon
,
Florin Udrea
,
Marise Bafleur
et al.
New lateral DMOS and IGBT structures realized on a partial SOI substrate based on LEGO process
Bipolar/BiCMOS Circuits and Technology Meeting (BCTM2005)
, Oct 2005, Santa Barbara, United States. pp.74-77
hal-01873690
v1
Journal articles
David Bourrier
,
Monique Dilhan
,
Ayad Ghannam
,
Lamine Ourak
,
Hugues Granier
.
BPN a new thick negative photoresist with high aspect ratio for MEMS applications
Microsystem Technologies
, Springer Verlag, 2012, 19 (3), pp.419 - 423.
⟨10.1007/s00542-012-1648-0⟩
hal-01873715
v1
Journal articles
David Bourrier
,
Ayad Ghannam
,
Monique Dilhan
,
Hugues Granier
.
Potential of BPN as a new negative photoresist for a very thick layer with high aspect ratio
Microsystem Technologies
, Springer Verlag, 2014, 20 (10-11), pp.2089 - 2096.
⟨10.1007/s00542-014-2071-5⟩
hal-01873319
v1
Conference papers
David Bourrier
,
Monique Dilhan
,
Ayad Ghannam
,
Hugues Granier
.
Comparisons of the new thick negative resist to Su8 resist
SPIE Advanced Lithography
, Feb 2011, San Jose, United States.
⟨10.1117/12.870496⟩
hal-01873836
v1
Conference papers
David Bourrier
,
Monique Dilhan
,
Hugues Granier
,
Arnaud Durlach
.
Les dépôts électrolytiques appliqués aux micro-dispositifs au LAAS
Journée Toulousaine d'Electrochimie (JTE 2016)
, Jul 2016, Toulouse, France
hal-01413101
v1
Other reports
Hugues Granier
,
Monique Dilhan
,
Christine Fourcade
.
Détermination du coût complet et élaboration des tarifs 2014 pour les produits et prestations de la plateforme de micro et nanotechnologies du CNRS-LAAS
Rapport LAAS N°14518. 2014
hal-01911188
v1
Other reports
Marianne Brillat
,
Inès Massiot
,
Laurent Mazenq
,
Adrian Laborde
,
Olivier Gauthier-Lafaye
et al.
Développement d'un procédé de gravure submicronique : Approche basée sur les copolymères à blocs auto-assemblés
Rapport LAAS n° 17669. 2017
hal-01867462
v1
Other reports
Hugues Granier
,
Adrian Laborde
,
Alexandre Arnoult
,
Antoine Maiorano
,
Aurélie Lecestre
et al.
Bilan 2015 des activités de la plateforme de micro et nano technologies du LAAS-CNRS
Rapport LAAS n° 16053. 2016
hal-01867468
v1
Other reports
Hugues Granier
,
Adrian Laborde
,
Alexandre Arnoult
,
Antoine Maiorano
,
Aurélie Lecestre
et al.
Plate forme de micro et nanotechnologies Bilan 2013 des zones
Rapport LAAS n° 14772. 2014, 108p
hal-01525171
v1
Conference papers
Hugues Granier
,
De Labachelerie M
,
Isabelle Sagnes
,
Caroline Boisard
.
Presentation of “Renatech”, the French network of academic microfabrication clean-rooms
ENRIS (European Nanofabrication Research Infrastructure Symposium) 2017
, Nordic Nanolab Network, May 2017, Trondheim, Norway
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