79 results  save search

hal-01203229v1  Conference papers
Olivier ThomasFabrice MathieuW. MansfieldC. HuangS. Trolier-Mckinstry et al.  Piezoelectric parametric amplifiers with integrated actuation and sensing capabilities
26th IEEE international conference on micro electro mechanical systems (MEMS 2013), Jan 2013, Taipei, Taiwan. ⟨10.1109/MEMSYS.2013.6474310⟩
hal-01144194v1  Conference papers
Denis DezestFabrice MathieuLaurent MazenqLiviu NicuCaroline Soyer et al.  PZT Nanofilm-Based Wafer Scale Nanoresonators
IEEE Frequency Control Symposium, Apr 2015, Denver, United States. 6p
hal-01687810v1  Journal articles
Adhitya BhaswaraHohyun KeumS RheeBernard LegrandFabrice Mathieu et al.  Fabrication of nanoplate resonating structures via micro-masonry
Journal of Micromechanics and Microengineering, IOP Publishing, 2014, 24 (11), pp.115012. ⟨10.1088/0960-1317/24/11/115012⟩
hal-00807158v1  Conference papers
Maéva ColletSven SalomonFlorent SeichepineY. CoffinierP. Caroff et al.  Capillary-assisted dielectrophoresis as an innovative protocol to align nanowires at single-level
Materials Research Society Fall Meeting, MRS Fall 2011, Symposium FF : Mechanical nanofabrication, nanopatterning, and nanoassembly, Nov 2011, Boston, MA, United States
hal-00181953v1  Conference papers
Naser BelmiloudFrédéric LochonIsabelle DufourPierre GuillotMatthieu Guirardel et al.  Determination of fluid viscoelastic properties using resonant microcantilever
International Workshop on Nanomechanical Sensors, 2006, Copenhague, Denmark. pp.2
hal-01816366v1  Conference papers
Maria Manrique-JuarezSylvain RatLaurent MazenqFabrice MathieuIsabelle Séguy et al.  Spin crossover materials for MEMS actuation: Film integration and characterization
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994294⟩
hal-01687809v1  Conference papers
Adhitya BhaswaraDenis DezestLiviu NicuThierry LeichleBernard Legrand. Determination of the effective mass and stiffness of a micro resonator from a single optical characterization
TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩
hal-01301323v1  Conference papers
Pierre-Henri DucrotIsabelle DufourFabrice MathieuLiviu NicuMartin Heinisch et al.  Simple fabrication process for organic piezoelectric resonators : application to viscosity measurement
13th International Workshop on Nanomechanical Sensing (NMC 2016), Jun 2016, Delft, Netherlands
hal-01271757v1  Conference papers
Pierre-Henri DucrotIsabelle DufourCédric AyelaFabrice MathieuLiviu Nicu. Electronic scheme for full control of organic piezoelectric MEMS resonatorss
2016 IEEE International Frequency Control Symposium (IFCS 2016), May 2016, La Nouvelle Orléans, LA, United States. ⟨10.1109/FCS.2016.7546797⟩
hal-01279717v1  Conference papers
Cécile FuinelKhadim DafféAdrian LabordeOlivier ThomasLaurent Mazenq et al.  HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS
The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China
hal-01962410v1  Conference papers
Adhitya BhaswaraHohyun KeumFabrice MathieuBernard LegrandSeok Kim et al.  Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction
42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria
tel-00260987v1  Habilitation à diriger des recherches
Liviu Nicu. Biomechanical sensors from the macro to the nanoscale - the way forward
Micro and nanotechnologies/Microelectronics. Université Paul Sabatier - Toulouse III, 2008
hal-01415864v1  Conference papers
Pierre-Henri DucrotIsabelle DufourFabrice MathieuLiviu NicuMarie-Christine Durrieu et al.  Study of cells mechanical properties thanks to organic piezoelectric MEMS resonators
Journées de l’école doctorale SPI Université de Bordeaux, Mar 2016, Bordeaux, France