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hal-00463965v1  Conference papers
Pierre-Eugène CoulonB.S. SahuMarzia CarradaSylvie Schamm-ChardonGérard Benassayag et al.  Ultra-low energy ion implantation of Si and Ge into HfO2-based layers for non volatile memory applications
39th IEEE European Solid-State Device Research Conference (ESSDERC 2009), Sep 2009, ATHENES, Greece