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hal-02481928v1  Conference papers
Isabelle DufourLuis Iglesias HernandezPriyadarshini ShanmugamJean-François MichaudDaniel Alquier et al.  Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures
2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone, United States
hal-01962410v1  Conference papers
Adhitya BhaswaraHohyun KeumFabrice MathieuBernard LegrandSeok Kim et al.  Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction
42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria
hal-00491437v1  Conference papers
Christophe LevalloisThierry LeichleVéronique BardinalThierry CampsJean-Baptiste Doucet et al.  Self-Aligned Polymer Microlenses Fabrication for VCSEL beam shaping
2nd European Optical Society Topical Meeting: "OPTICAL MICROSYSTEMS", Sep 2007, Capri, Italy. p1
hal-01816366v1  Conference papers
Maria Manrique-JuarezSylvain RatLaurent MazenqFabrice MathieuIsabelle Séguy et al.  Spin crossover materials for MEMS actuation: Film integration and characterization
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994294⟩
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hal-01326492v1  Conference papers
Aurélie LecestreAziliz LecomteDavid BourrierPascal DubreuilEmeline Descamps et al.  Plasma etching of thick Parylene C for fabrication of biocompatible electrodes
9th Workshop on Plasma Etch and Strip in Microtechnology (PESM2016), May 2016, Grenoble, France
hal-00865906v1  Conference papers
Liviu NicuThomas AlavaThierry LeichleDaisuke SayaJean Bernard Pourciel et al.  Integrative technology-based approach of MEMS for biological applications
IEEE International Solid-State Circuits Conference, 2010, San Francisco, United States. 12 p
hal-01687809v1  Conference papers
Adhitya BhaswaraDenis DezestLiviu NicuThierry LeichleBernard Legrand. Determination of the effective mass and stiffness of a micro resonator from a single optical characterization
TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩
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hal-01871405v1  Conference papers
Gabriel LemercierFadhila Sekli-BelaidiVenkata VajralaEmeline DescampsN. Sojic et al.  Toward the analysis of mitochondria isolated from leukemic cells with electrochemically instrumented microwell arrays
19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Jun 2017, Kaohsiung, Taiwan. 4p., ⟨10.1109/TRANSDUCERS.2017.7994374⟩
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hal-01816372v1  Conference papers
Daisuke SayaDenis DezestThierry LeichleFabrice MathieuLiviu Nicu et al.  Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films
2017 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF)/International Workshop on Acoustic Transduction Materials and Devices (IWATMD)/Piezoresponse Force Microscopy (PFM), May 2017, Atlanta, United States. ⟨10.1109/ISAF.2017.8000219⟩
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hal-01279717v1  Conference papers
Cécile FuinelKhadim DafféAdrian LabordeOlivier ThomasLaurent Mazenq et al.  HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS
The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩
hal-02413900v1  Conference papers
Pierre MoritzFabrice MathieuDavid BourrierDaisuke SayaThomas Blon et al.  Development Of Micro-Magnets For The Electromagnetic Transduction Of MEMS
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Jun 2019, Berlin, Germany. pp.1748-1751, ⟨10.1109/TRANSDUCERS.2019.8808335⟩