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hal-02048921v1  Conference papers
Philippe MeniniBrieux DurandGuilhem LarrieuAudrey ChapelleAurélie Lecestre et al.  Micro and nanotechnology evolution towards vertical Silicon nanowires for ultra-sensitive gas detection
IX International Workshop on Semiconductor Gas Sensors SGS 2015, Dec 2015, Zakopane, Poland
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hal-02046543v1  Conference papers
Brieux DurandAurélie LecestrePhilippe MeniniGuilhem Larrieu. Miniaturized 3D gas sensors based on silicon nanowires for ppb range detection
IEEE Nanotechnology Materials and Devices Conference (NMDC 2016), Oct 2016, Toulouse, France. pp.1-2, ⟨10.1109/NMDC.2016.7777098⟩