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hal-02087150v1  Conference papers
H. Chalabi, Philippe Menini, Emmanuel Scheid, Ludovic Salvagnac, Véronique Conédéra et al.  Development of integrated smart nose based on WO3 gas sensors
Eurosensors XX, Sep 2006, Göteborg, Sweden
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hal-02099873v2  Conference papers
P. Yoboué, Philippe Menini, Habib Chalabi, Véronique Conédéra, Ludovic Salvagnac et al.  Development of a Micro-hotplate for different Metal Oxide Gas Sensors with High Operating Temperatures
MICROMECHANICS EUROPE 2007, Sep 2007, Guimaraes, Portugal. pp.191-194
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hal-01511365v2  Journal articles
Pierre Temple-Boyer, Bernard Rousset, Emmanuel Scheid. Influences of deposition and crystallization kinetics on the properties of silicon films deposited by low-pressure chemical vapour deposition from silane and disilane
Thin Solid Films, Elsevier, 2010, 518 (23), pp.6897-6903. ⟨10.1016/j.tsf.2010.07.037⟩
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hal-01216418v1  Conference papers
Brieux Durand, Aurélie Lecestre, Laurent Mazenq, Philippe Menini, Guilhem Larrieu. Capteurs de gaz à base de nanofils verticaux et ordonnés de silicium
Journées Nationales du Réseau Doctoral en Microélectronique (JNRDM2015), May 2015, Bordeaux, France. 4p
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hal-01874765v1  Conference papers
Fadhila Sekli-Belaidi, William Tiddi, Matthieu Polverel, Gabriel Lemercier, Aurélie Lecestre et al.  Integration of ring nanoelectrodes into microwell for the bioelectrochemical analysis in sub-picoliter volumes
18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2015), Jun 2015, Anchorage, AK, United States. 4p., ⟨10.1109/TRANSDUCERS.2015.7181224⟩
hal-02048342v1  Conference papers
Brieux Durand, Aurélie Lecestre, Laurent Mazenq, Philippe Menini, Guilhem Larrieu. 3D silicon nanowires sensors for NO2 detection down to ppb levels
2015 MRS Fall Meeting & Exhibit, Nov 2015, Boston, United States
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hal-02048921v1  Conference papers
Philippe Menini, Brieux Durand, Guilhem Larrieu, Audrey Chapelle, Aurélie Lecestre et al.  Micro and nanotechnology evolution towards vertical Silicon nanowires for ultra-sensitive gas detection
IX International Workshop on Semiconductor Gas Sensors SGS 2015, Dec 2015, Zakopane, Poland
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hal-01326492v1  Conference papers
Aurélie Lecestre, Aziliz Lecomte, David Bourrier, Pascal Dubreuil, Emeline Descamps et al.  Plasma etching of thick Parylene C for fabrication of biocompatible electrodes
9th Workshop on Plasma Etch and Strip in Microtechnology (PESM2016), May 2016, Grenoble, France
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hal-01503126v1  Journal articles
Fadhila Sekli-Belaidi, Emilie Vanhove, William Tiddi, Matthieu Polverel, Gabriel Lemercier et al.  Integration of ring nanoelectrodes into microwells for the bioelectrochemical analysis in sub-picolitre volumes
Sensors and Actuators B: Chemical, Elsevier, 2016, 232, pp.345-356. ⟨10.1016/j.snb.2016.03.130⟩
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hal-01871410v1  Conference papers
Ahmet Lale, Auriane Grappin, Emmanuel Scheid, Jérôme Launay, Pierre Temple-Boyer. Design, realization and characterization of silicon nanowire ion sensitive field effect transistors
IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2016, Oct 2016, Toulouse, France. 2p., ⟨10.1109/NMDC.2016.7777159⟩
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hal-02046543v1  Conference papers
Brieux Durand, Aurélie Lecestre, Philippe Menini, Guilhem Larrieu. Miniaturized 3D gas sensors based on silicon nanowires for ppb range detection
IEEE Nanotechnology Materials and Devices Conference (NMDC 2016), Oct 2016, Toulouse, France. pp.1-2, ⟨10.1109/NMDC.2016.7777098⟩
hal-02193341v1  Conference papers
Brieux Durand, Aurélie Lecestre, Philippe Menini, Guilhem Larrieu. Miniaturized 3D gas sensors based on silicon nanowires for ppb range detection
8th Franco-Spanish Workshop Ibernam-CMC2, LAAS, Oct 2016, Toulouse, France
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hal-01528381v1  Journal articles
Aziliz Lecomte, Aurélie Lecestre, David Bourrier, Marie-Charline Blatché, Laurent Jalabert et al.  Deep plasma etching of Parylene C patterns for biomedical applications
Microelectronic Engineering, Elsevier, 2017, 177, pp.70 - 73. ⟨10.1016/j.mee.2017.02.012⟩
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hal-01871397v1  Conference papers
Ahmet Lale, Auriane Grappin, David Bourrier, Laurent Mazenq, Aurélie Lecestre et al.  Design, realization and characterization of all-arround SiO2/Al2O3gate, suspended silicon nanowire chemical field effect transistors
19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Jun 2017, Kaohsiung, Taiwan. 4p., ⟨10.1109/TRANSDUCERS.2017.7994346⟩
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hal-01687839v1  Conference papers
Ahmet Lale, Auriane Grappin, David Bourrier, Laurent Mazenq, Aurélie Lecestre et al.  Development of all-around, SiO2/Al2O3 gate, suspended silicon nanowire chemical field effect transistors Si-nw-ChemFET
EUROSENSORS XXXI, Sep 2017, Paris, France
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hal-02043421v1  Journal articles
Ahmet Lale, Emmanuel Scheid, Fuccio Cristiano, Lucien Datas, Benjamin Reig et al.  Study of aluminium oxide thin films deposited by plasma-enhanced atomic layer deposition from tri-methyl-aluminium and dioxygen precursors: investigation of interfacial and structural properties
Thin Solid Films, Elsevier, 2018, 666, pp.20 - 27. ⟨10.1016/j.tsf.2018.09.028⟩

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