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hal-01634255v1
Journal articles
Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films Proceedings, MDPI, 2017, 1 (4), pp.551. ⟨10.3390/proceedings1040551⟩ |
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hal-01677496v1
Journal articles
Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples Journal of Micromechanics and Microengineering, IOP Publishing, 2017, 27 (5), pp.055018. ⟨10.1088/1361-6439/aa6a27⟩ |
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