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hal-02089708v1
Conference papers
Optimization of a BiCMOS integrated tranducer for self-compensated capacitive pressure sensor ICECS'99, IEEE International Conference on Electronics, Circuits and Systems, Sep 1999, Paphos, Cyprus |
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hal-02170319v1
Conference papers
New Technological advances for microshielded coplanar circuits on silicon Micro Mechanics Europe (MME1999), Sep 1999, Gif-sur-Yvette, France. pp.109-111 |
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hal-02170328v1
Conference papers
Thermal Drift and Chip Size in Capacitive Pressure Sensors Eurosensors XIII, Sep 1999, La Haye, Netherlands. pp.461-464 |
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