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hal-01158903v1  Journal articles
Véronique BardinalThierry CampsBenjamin ReigSami AbadaEmmanuelle Daran et al.  Advances in polymer-based optical MEMS fabrication for VCSEL beam shaping
IEEE Journal of Selected Topics in Quantum Electronics, Institute of Electrical and Electronics Engineers, 2014, 21 (4), pp.Article number 2700308. ⟨10.1109/JSTQE.2014.2369743⟩