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		Sort  Relevance  Author A→Z  Author Z→A  Title A→Z  Title Z→A  Date de publication croissante  Date de publication décroissante  Date de dépôt croissante  Date de dépôt décroissante Number 30 results per page 50 results per page 100 results per page × Merci d'indiquer la raison de votre demande Annuler Envoyer la demande  Tools  o  Export XML-TEI BibTeX EndNote CSV PDF RTF  Advanced export...  Syndicated feeds RSS ATOM
	hal-01158903v1  Journal articles Véronique Bardinal, Thierry Camps, Benjamin Reig, Sami Abada, Emmanuelle Daran et al.  Advances in polymer-based optical MEMS fabrication for VCSEL beam shaping IEEE Journal of Selected Topics in Quantum Electronics, Institute of Electrical and Electronics Engineers, 2014, 21 (4), pp.Article number 2700308. ⟨10.1109/JSTQE.2014.2369743⟩
	hal-01677496v1  Journal articles Sami Abada, Laurène Salvi, Rémi Courson, Emmanuelle Daran, Benjamin Reig et al.  Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples Journal of Micromechanics and Microengineering, IOP Publishing, 2017, 27 (5), pp.055018. ⟨10.1088/1361-6439/aa6a27⟩
	hal-01634255v1  Journal articles Thierry Camps, Sami Abada, Benjamin Reig, Jean-Baptiste Doucet, Rémi Courson et al.  Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films Proceedings, MDPI, 2017, 1 (4), pp.551. ⟨10.3390/proceedings1040551⟩
	hal-02043421v1  Journal articles Ahmet Lale, Emmanuel Scheid, Fuccio Cristiano, Lucien Datas, Benjamin Reig et al.  Study of aluminium oxide thin films deposited by plasma-enhanced atomic layer deposition from tri-methyl-aluminium and dioxygen precursors: investigation of interfacial and structural properties Thin Solid Films, Elsevier, 2018, 666, pp.20 - 27. ⟨10.1016/j.tsf.2018.09.028⟩
	hal-02383256v1  Journal articles David Barat, Véronique Bardinal, I. Dika, O. Soppera, Anna Rumyantseva et al.  Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization Microelectronic Engineering, Elsevier, 2013, 111, pp.204-209. ⟨10.1016/j.mee.2013.03.155⟩
		Sort  Relevance  Author A→Z  Author Z→A  Title A→Z  Title Z→A  Date de publication croissante  Date de publication décroissante  Date de dépôt croissante  Date de dépôt décroissante Number 30 results per page 50 results per page 100 results per page  Tools  o  Export XML-TEI BibTeX EndNote CSV PDF RTF  Advanced export...  Syndicated feeds RSS ATOM