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	hal-02046290v1 Conference papers Lionel Presmanes, Y. Thimont, Audrey Chapelle, Frédéric Blanc, Chabane Talhi et al. Integration by shadow mask process of ZnO:Ga sputtered layers onto microsensor platform for detection of sub-ppm acetaldehyde concentration EUROSENSORS 2017, Sep 2017, Paris, France
	hal-02172260v1 Conference papers L. Presmanes, V. Gunasekaran, Y. Thimont, I. Sinnarasa, A. Barnabé et al. Ga doped ZnO thin films deposited by RF sputtering for NO2 sensing The Experiment@ International Conference (Exp.at'19), Jun 2019, Funchal, Portugal
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