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hal-00431019v1  Conference papers
Fabienne PennecDavid PeyrouDimitri LerayChristina VilleneuveAnthony Coustou et al.  DC CONTACT MODELING OF ELECTROSTATICALLY ACTUATED SWITCHES WITH LOW VOLTAGE
20th MicroMechanics Europe Workshop (MME 2009), Sep 2009, Toulouse, France. pp.B01, ID 113