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	hal-02046290v1  Conference papers Lionel Presmanes, Y. Thimont, Audrey Chapelle, Frédéric Blanc, Chabane Talhi et al.  Integration by shadow mask process of ZnO:Ga sputtered layers onto microsensor platform for detection of sub-ppm acetaldehyde concentration EUROSENSORS 2017, Sep 2017, Paris, France
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