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hal-02170328v1  Conference papers
G BlasquezX ChauffleurPatrick PonsC DouziechP Favaro et al.  Thermal Drift and Chip Size in Capacitive Pressure Sensors
Eurosensors XIII, Sep 1999, La Haye, Netherlands. pp.461-464
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hal-02170319v1  Conference papers
E Saint EtienneG BlasquezPatrick PonsRobert PlanaC Douziech et al.  New Technological advances for microshielded coplanar circuits on silicon
Micro Mechanics Europe (MME1999), Sep 1999, Gif-sur-Yvette, France. pp.109-111
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hal-02089708v1  Conference papers
Philippe MeniniG. BlasquezPatrick PonsC DouziechP Favaro et al.  Optimization of a BiCMOS integrated tranducer for self-compensated capacitive pressure sensor
ICECS'99, IEEE International Conference on Electronics, Circuits and Systems, Sep 1999, Paphos, Cyprus