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hal-02330662v1  Poster communications
Sadek ThibaultCarnide GuillaumeMyrtil L. KahnLuc Stafford. Electrical and optical characterization of a capacitively-coupled RF plasma with a pulsed argon gas injection
24th International Symposium on Plasma Chemistry (ISPC), Jun 2019, Napoli, Italy. Proceeding of the International Syposium on Plasma Chemistry, 2019, Proceeding of the International Syposium on Plasma Chemistry