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hal-01736089v1  Journal articles
W. LerchS. PaulJ. NiessFuccio CristianoY. Lamrani et al.  Deactivation of Solid Phase Epitaxy-Activated Boron Ultrashallow Junctions
Journal of The Electrochemical Society, Electrochemical Society, 2005, 152 (10), pp.G787. ⟨10.1149/1.2018176⟩
hal-01736096v1  Journal articles
Fuccio CristianoNikolay CherkashinP. CalvoY. LamraniXavier Hebras et al.  Thermal stability of boron electrical activation in preamorphised ultra-shallow junctions
Materials Science and Engineering B: Solid-State Materials for Advanced Technology, Elsevier, 2004, 114-115 (SPEC. ISS.), pp.174-179. ⟨10.1016/j.mseb.2004.07.049⟩
hal-01736098v1  Journal articles
P. CalvoAlain ClaverieNikolay CherkashinB. ColombeauY. Lamrani et al.  Thermal evolution of {1 1 3} defects in silicon: transformation against dissolution
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 2004, 216 (1-4), pp.173-177. ⟨10.1016/j.nimb.2003.11.075⟩
hal-01736079v1  Journal articles
Fuccio CristianoY. LamraniF. SeveracM. GavelleS. Boninelli et al.  Defects evolution and dopant activation anomalies in ion implanted silicon
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 2006, 253 (1-2), pp.68-79. ⟨10.1016/j.nimb.2006.10.046⟩
hal-01736100v1  Conference papers
W. LerchS. PaulJ. NiessFuccio CristianoY. Lamrani et al.  Solid phase epitaxy - Activation and deactivation of boron in ultra-shallow junctions
Advanced short-time thermal processing for Si-based CMOS devices , 2004, indéterminée, Unknown Region. pp.90-105
hal-01736101v1  Journal articles
Fuccio CristianoNikolay CherkashinXavier HebrasP. CalvoY. Lamrani et al.  Ion beam induced defects in crystalline silicon
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 2004, 216 (1-4), pp.46-56. ⟨10.1016/j.nimb.2003.11.019⟩