Conception et réalisation dun nouveau capteur de gaz passif communicant à transduction RF

Hamida Hallil 1
1 LAAS-M2D
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : In this work, feasibility of gas sensors based on Titanium Dioxide (TiO2) dielectric resonator, operating with whispering-gallery modes, is presented. The gas or humidity adsorption modifies the TiO2 dielectric permittivity and such modification induces variation in the resonant frequencies of high-Q whispering-gallery modes in the millimeter-wave frequency range. Full-wave electromagnetic simulation demonstrates that the measurement of this variation allows the derivation of few parts-per-million (ppm) fluctuations in gas or humidity concentration. For validation purposes very first prototypes of resonator operating with whispering-gallery modes in the millimeter-wave frequency range are micro-machined. The measured performances confirm that such high-Q resonant modes are very sensitive to small variations in dielectric resonator permittivity. Moreover we validate experimentally that these small variations can be remotely detected from the RADAR interrogation of an antenna loaded by the whispering-gallery modes resonator.
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Submitted on : Tuesday, December 14, 2010 - 9:35:06 AM
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  • HAL Id : tel-00546243, version 1

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Hamida Hallil. Conception et réalisation dun nouveau capteur de gaz passif communicant à transduction RF. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2010. Français. ⟨tel-00546243⟩

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