E. John, D. Wessel, and . Boucher, Comparison Between Cross-Track and Conical Scanning Microwave Window Channels Near 90, GHz IEEE. TRANSACTIONS ON GEOSCIENCE AND REMOTE SENSING, vol.36, issue.1, pp.16-24, 1998.

Z. Zhu, C. Gibson, A. H. Samuel, and I. P. Matthews, Measurement of gas concentrations by means of the power saturation technique in a microwave cavity spectrometer, IEEE Transactions on Instrumentation and Measurement, vol.43, issue.1, pp.86-89, 1994.
DOI : 10.1109/19.286359

A. Kirstein and . Hierlemann, Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes, J. Sensors and Actuators B, vol.126, pp.431-440, 2007.

K. Shimanoe, New perspectives of gas sensor technology, J. Sensors and Actuators B, vol.138, pp.100-107, 2009.

[. I. , R. Shepherd, S. Beirne, K. Tong-laub, B. Corcoran et al., Monitoring chemical plumes in an environmental sensing chamber with a wireless chemical sensor network, J. Sensors and Actuators B, vol.121, issue.11, pp.142-149, 2007.

[. I. Zhang, A. Boyd, A. Tselev, M. Paranjape, and P. Barbaraa, Mechanism of NO2 detection in carbon nanotube field effect transistor chemical sensors, Applied Physics Letters, vol.88, issue.12, pp.1-3, 2006.
DOI : 10.1063/1.2187510

[. Chopra and A. Phama, Carbon-nanotube-based resonant-circuit sensor for ammonia, Applied Physics Letters, vol.80, issue.24, pp.1-3, 2002.
DOI : 10.1063/1.1486481

[. I. Thai, A. Haque, J. Ratner, G. R. Dejean, and M. M. Tentzeris, Development of a fully-integrated ultrasensitive wireless sensor utilizing carbon nanotubes and surface plasmon theory, 2008 58th Electronic Components and Technology Conference, 2008.
DOI : 10.1109/ECTC.2008.4550008

L. Cordova-lopez, . Mason, A. Cullen, and A. Shaw, Online vehicle and atmospheric pollution monitoring using GIS and wireless sensor networks, Journal of Physics: Conference Series, vol.76, pp.12019-12020, 2007.
DOI : 10.1088/1742-6596/76/1/012019

D. Jeutter, F. Josse, M. Johnson, M. Wenzel, J. Hossenlopp et al., Design of a portable guided SH-SAW chemical sensor system for liquid environments, Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005., pp.59-68, 2005.
DOI : 10.1109/FREQ.2005.1573903

C. Zhou, J. Downey, D. Stancil, and T. Mukherjee, A compact positioning and velocity RF sensor for improved inertial navigation, 2009 IEEE MTT-S International Microwave Symposium Digest, pp.1421-1424, 2009.
DOI : 10.1109/MWSYM.2009.5165973

C. Shen, Y. Cheng, and S. Wang, A Nitrogen Dioxide Surface Acoustic Wave Sensor Based on Polyaniline/Tungsten Oxide Nanocomposite, 2010 International Conference on Measuring Technology and Mechatronics Automation, pp.204-207, 2009.
DOI : 10.1109/ICMTMA.2010.24

N. Y. Kozlovski and D. C. Malocha, Multi-track low-loss SAW tags with flexible impedance matching for passive wireless sensor applications, 2010 IEEE International Frequency Control Symposium, pp.279-286, 2010.
DOI : 10.1109/FREQ.2010.5556328

X. Zhang and F. Wang, Key Technologies of Passive Wireless Sensor Networks Based on Surface Acoustic Wave Resonators, 2008 IEEE International Conference on Networking, Sensing and Control, pp.1253-1258, 2008.
DOI : 10.1109/ICNSC.2008.4525409

W. Yumei, L. Ping, and Z. Zhikun, A passive coding resonant wireless SAW temperature sensor array, Proceedings of IEEE Sensors, 2004., pp.872-875, 2004.
DOI : 10.1109/ICSENS.2004.1426309

J. M. Pavlina and D. C. Malocha, Chipless RFID SAW sensor system-level simulator, 2010 IEEE International Conference on RFID (IEEE RFID 2010), pp.252-259, 2010.
DOI : 10.1109/RFID.2010.5467237

C. Wen, C. Zhu, Y. Ju, H. Xu, and Y. Qiu, A Novel Dual Track SAW Gas Sensor Using Three-IDT and Two-MSC, IEEE Sensors Journal, vol.9, issue.12, pp.2010-2015, 2009.
DOI : 10.1109/JSEN.2009.2033026

M. Pasternak, Overtone Oscillator for SAW Gas Detectors, IEEE Sensors Journal, vol.6, issue.6, pp.1497-1501, 2006.
DOI : 10.1109/JSEN.2006.884548

C. Bernou, D. Rebière, and J. Pistre, Microwave sensors: a new sensing principle. Application to humidity detection, Sensors and Actuators B: Chemical, vol.68, issue.1-3, pp.88-93, 2000.
DOI : 10.1016/S0925-4005(00)00466-4

URL : https://hal.archives-ouvertes.fr/hal-01487672

G. Tortissier, «Étude et développement d'une plateforme de détection chimique à ondes acoustiques de surface pour environnement sévère haute température», 2009.

F. Seifert, W. Bulst, and C. Ruppel, Mechanical sensors based on surface acoustic waves, Sensors and Actuators A: Physical, vol.44, issue.3, pp.231-239, 1994.
DOI : 10.1016/0924-4247(94)00808-6

L. Reindl, A. Pohl, G. Scholl, and R. , A wireless pressure measurement system using a saw hybrid sensor, IEEE MTT-S, vol.48, issue.12, pp.2730-2735, 2000.

L. Reindl, A. Pohl, G. Scoll, and R. , SAW-based radio sensor systems, IEEE Sensors Journal, vol.1, issue.1, pp.68-78, 2001.
DOI : 10.1109/JSEN.2001.923589

M. Pasternak, Hypersonic generator for SAW gas sensors " IEEE sensors proceeding, pp.888-891, 2004.

A. Stelzer, S. Scheiblholfer, S. Schuster, and R. Teichmann, Wireless sensor marking and temperature measurement with SAW-identification tags, Measurement, vol.41, issue.5, pp.579-588, 2008.
DOI : 10.1016/j.measurement.2007.02.004

J. Oh and B. Choi, Seung-Yop Lee " SAW based passive sensor with passive signal conditioning using MEMS A/D converter, J. Sensors and actuators A, vol.41, pp.631-639, 2008.

J. Charles-bolomey, S. Capdevila, L. Jofre, and J. Romeu, Electromagnetic Modeling of RFID-Modulated Scattering Mechanism. Application to Tag Performance Evaluation, Proceedings of the IEEE, pp.1555-1559, 2010.

S. Shrestha, A Chipless RFID Sensor System for Cyber Centric Monitoring Applications, IEEE Transactions on Microwave Theory and Techniques, vol.57, issue.5, pp.1303-1309, 2009.
DOI : 10.1109/TMTT.2009.2017298

R. Gadh, RFIDVA Unique Radio Innovation for the 21st, Proceedings of the IEEE, pp.1546-1549, 2010.

S. Roy, V. Jandhyala, J. R. Smith, D. J. Wetherall, B. P. Otis et al., RFID: From Supply Chains to Sensor Nets, Proceedings of the IEEE, pp.1583-1592, 2010.
DOI : 10.1109/JPROC.2010.2053690

L. Yang, R. Zhang, D. Staiculescu, C. P. Wong, and M. M. Tentzeris, A Novel Conformal RFID-Enabled Module Utilizing Inkjet-Printed Antennas and Carbon Nanotubes for Gas-Detection Applications, IEEE Antennas and Wireless Propagation Letters, vol.8, pp.653-656, 2009.
DOI : 10.1109/LAWP.2009.2024104

R. Bhattacharyya, C. Floerkemeier, and S. Sarma, Low-Cost, Ubiquitous RFID-Tag-Antenna-Based Sensing, Proceedings of the IEEE, pp.1593-1600, 2010.
DOI : 10.1109/JPROC.2010.2051790

D. Dardar, D. Raffaele, C. Errico, A. Roblin, M. Z. Sibille et al., Ultrawide Bandwidth RFID: The Next Generation?, Proceedings of the IEEE, pp.1570-1582, 2010.
DOI : 10.1109/JPROC.2010.2053015

M. M. Jatlaoui, « Capteurs passifs à transduction électromagnétique pour la mesure sans fil de la pression», Thèse de doctorat de l'INPT de Toulouse, 2009.

M. M. Jatlaoui, P. Pons, and H. Aubert, Pressure micro-sensor based on Radio-Frequency transducer, 2008 IEEE MTT-S International Microwave Symposium Digest, 2008.
DOI : 10.1109/MWSYM.2008.4633274

M. M. Jatlaoui, F. Chebila, I. Gmati, P. Pons, and H. Aubert, New electromagnetic transduction micro-sensor concept for passive wireless pressure monitoring application, TRANSDUCERS 2009, 2009 International Solid-State Sensors, Actuators and Microsystems Conference, 2009.
DOI : 10.1109/SENSOR.2009.5285739

T. Thai, M. M. Jatlaoui, H. Aubert, P. Pons, G. R. Dejean et al., A novel passive wireless ultrasensitive RF temperature transducer for remote sensing, IEEE MTT IMS, pp.1-4, 2010.

L. Liu, E. Manli, Z. Wang, and M. Zhou, A 3D self-positioning method for wireless sensor nodes based on linear FMCW and TFDA, 2009 IEEE International Conference on Systems, Man and Cybernetics, pp.2990-2995, 2009.
DOI : 10.1109/ICSMC.2009.5345923

K. Prabal and . Dutta, Towards Radar-Enabled Sensor Networks, IEEE. Information Processing in Sensor Networks, pp.467-474, 2006.

F. Chebila, M. M. Jatlaoui, P. Pons, and H. Aubert, Pressure measurement from the RADAR interrogation of passive sensors, 2010 IEEE Antennas and Propagation Society International Symposium, pp.1-4, 2010.
DOI : 10.1109/APS.2010.5561726

M. M. Jatlaoui, F. Chebila, P. Pons, and H. Aubert, New micro-sensors identification techniques based on reconfigurable multi-band scatterers, 2009 Asia Pacific Microwave Conference, pp.1-4, 2009.
DOI : 10.1109/APMC.2009.5384335

F. Chebila, M. M. Jatlaoui, P. Pons, and H. Aubert, Reconfigurable multi-band scatterers for micro-sensors identification, 2009 IEEE Antennas and Propagation Society International Symposium, pp.1-4, 2009.
DOI : 10.1109/APS.2009.5171704

H. Meixner and U. Lampe, Metal Oxide Sensors, Proceedings of the International Solid-State Sensors and Actuators Conference, TRANSDUCERS '95, pp.198-202, 1996.
DOI : 10.1109/SENSOR.1995.717380

D. Lee and D. Lee, Environmental Gas Sensors, IEEE SENSORS J, vol.1, issue.3, pp.214-224, 2001.

R. Hoffmann, «Hand book of microwave integrated circuits», p.527, 1987.

J. Oh, T. Moon, T. Kim, C. Kim, J. H. Lee et al., The dependence of dielectric properties on the thickness of (Ba,Sr)TiO3 thin films, Current Applied Physics, vol.7, issue.2, pp.168-171, 2007.
DOI : 10.1016/j.cap.2006.03.004

C. Malagu, M. C. Carotta, S. Gherardi, V. Guidi, B. Vendemiati et al., AC measurements and modeling of WO3 thick film gas sensors, Sensors and Actuators B: Chemical, vol.108, issue.1-2, pp.70-74, 2005.
DOI : 10.1016/j.snb.2004.10.049

A. Thoria and . Baeraky, Microwave Measurements of Dielectric Properties of Zinc Oxide at High Temperature, Egypt. J. Solids, vol.30, issue.1, 2007.

N. Kumada, H. Ogiso, K. Shiroki, S. Wada, Y. Yonesaki et al., Rising Tc in Bi and Cu co-doped BaTiO3, Materials Letters, vol.64, issue.3, pp.383-385, 2010.
DOI : 10.1016/j.matlet.2009.11.021

G. Boudouris, Ph??nom??nes de relaxation di??lectrique (absorption non r??sonnante et dispersion) pr??sent??s par les gaz dans le domaine des microondes, La Rivista Del Nuovo Cimento, vol.63, issue.1, pp.1-56, 1969.
DOI : 10.1007/BF02886605

L. Thierry, Caractérisation hyperfréquence de matériaux isolants de haute permittivité en vue de l'intégration de fonctions passives dans les circuits intégrés avancés, Thèse de Doctorat de l'université de Savoie, 2005.

B. Licznerski, K. Nitsch-"-low, . Frequency, R. Of-tio2, and . Films, (Rutile)???Glass Thick Films, ElectroComponent Science and Technology, vol.4, issue.1, pp.1-7, 1977.
DOI : 10.1155/APEC.4.1

URL : http://doi.org/10.1155/apec.4.1

K. Arshak, D. Morris, A. Arshak, O. Korostynska, and E. Jafer, Evaluating the suitability of thick-film TiO2 capacitors for use in a wireless pressure measurement system, Materials Science and Engineering: C, vol.26, issue.5-7, pp.1077-1081, 2006.
DOI : 10.1016/j.msec.2005.09.001

J. Jouhannaud, J. Rossignol, and D. Stuerga, Metal oxide-based gas sensor and microwave broad-band measurements: an innovative approach to gas sensing, Journal of Physics: Conference Series, vol.76, issue.012043, pp.1-6, 2007.
DOI : 10.1088/1742-6596/76/1/012043

G. «. Julie, Etude de capacités en couches minces à base d'oxydes métalliques à très forte constante diélectrique, BaTiO3, 2005.

G. Benoit, Elaboration de Capacités Variables Ferroélectriques à base de, 2008.

F. Pierre, Résonateurs diélectriques

G. Prigent and «. , Méthode de conception de filtres planaires à bande étroite dans les domaines centimétrique et millimétrique, Thèse de doctorat de l'Université de Bretagne Occidentale, 2002.

S. Kerr and «. , Dual Mode Dielectric Resonator Filters », Bachelor of Engineering by The university of Queensland

M. Saàdaoui and «. , Optimisation des circuits passifs micro-ondes suspendus sur membrane diélectrique», Thèse de doctorat de l, 2005.

F. Bouchriha, Développement de filières technologiques dédiées à l'intégration de microsystèmes millimétriques sur silicium, Thèse de doctorat de l, 2005.

B. Bianco and M. Parodi, Determination of the propagation constant of uniform microstrip lines, Alta Frequenza, vol.XLV, issue.2, pp.135-142, 1976.

M. Saàdaoui and «. , Optimisation des circuits passifs micro-ondes suspendus sur membrane diélectrique», Thèse de doctorat de l, 2005.

B. «. Guillon, Conception et réalisation de circuits millimétriques micro-usinés sur silicium : Application a la réalisation d'un oscillateur à résonateur diélectrique en bande Ka, Thèse de doctorat de l, 1999.

E. Saint and E. , Nouvelle filière technologique de circuits micro-ondes coplanaires à faibles pertes et à faible dispersion sur membrane composite d'oxyde et de nitrure de silicium, Thèse de doctorat de l, 1998.

L. Jalabert, Ingénierie de grille pour application à la microélectronique MOS submicronique, Thèse de doctorat de l, 2001.

N. I. Dib, W. P. Harokopus, L. P. Katehi, C. C. Ling, and G. M. Rebeiz, Study of a novel planar transmission line, 1991 IEEE MTT-S International Microwave Symposium Digest, 1991.
DOI : 10.1109/MWSYM.1991.147080

R. F. Drayton and L. P. Katehi, Development of self-packaged high frequency circuits using micromachining techniques, IEEE Transactions on Microwave Theory and Techniques, vol.43, issue.9, pp.2073-2080, 1995.
DOI : 10.1109/22.414543

S. V. Robertson, L. P. Katehi, and G. M. Rebeiz, Micromachined W-band filters, IEEE Transactions on Microwave Theory and Techniques, vol.44, issue.4, pp.598-606, 1996.
DOI : 10.1109/22.491027

C. Y. Chi and G. M. Rebeiz, Planar microwave and millimeter-wave lumped elements and coupled-line filters using micro-machining techniques, IEEE Transactions on Microwave Theory and Techniques, vol.43, issue.4, pp.730-738, 1995.
DOI : 10.1109/22.375218

T. M. Weller, L. P. Katehi, and G. M. Rebeiz, A 250-GHz microshield bandpass filter, IEEE Microwave and Guided Wave Letters, vol.5, issue.5, pp.153-155, 1995.
DOI : 10.1109/75.374082

P. Blondy, A. Brown, D. Cross, and G. M. Rebeiz, Low-loss micromachined filters for millimeter-wave communication systems, IEEE Transactions on Microwave Theory and Techniques, vol.46, issue.12, pp.2283-2288, 1998.
DOI : 10.1109/22.739212

A. Bosseboeuf and S. Petitgrand, Application of interference microscopy techniques in te MEMS field. Microsystem Engineering: Metrology and Inspection III, Proc. SPIE 5145, pp.1-16, 2003.

F. Ay, Silicon oxynitride layers for applications in optical waveguides Master de l'institut d'ingénierie et de sciences, 2000.

L. M. Mack and A. Reisman, Stress Measurements of Thermally Grown Thin Oxides on (100) Si Substrates, Journal of The Electrochemical Society, vol.136, issue.11, 1989.
DOI : 10.1149/1.2096466

P. Temple-boyer, L. Bouscayrol, P. Fadel, and B. Rousset, Etude des matériaux LPCVD issus de la filière silicium, 2004.

B. Rousset, L. Furgal, and P. Temple-boyer, Development of SiNx LPCVD processes for microtechnological applications, Le Journal de Physique IV, vol.11, issue.PR3, pp.937-944
DOI : 10.1051/jp4:20013117

A. G. Noskov and E. B. Gorokhov, Correlation between stress and structure in chemically vapour deposited silicon nitride films, Thin Solid Films, vol.162, pp.129-143, 1988.
DOI : 10.1016/0040-6090(88)90201-5

K. Kouakou-léonce, « Faisabilité de films isolants de nitrure de silicium par technique de dépôt en phase vapeur à basse température : Comparaison des filières gazeuses Dichlorosilane- Ammoniac et Disilane-Ammoniac, Thèse de doctorat de l, 1992.

K. F. Roenigk and K. F. Jensen, Low Pressure CVD of Silicon Nitride, Journal of The Electrochemical Society, vol.134, issue.7, pp.1777-1785
DOI : 10.1149/1.2100756

K. D. Mackenzie, B. Reelfs, M. W. Devre, R. Westerman, and D. J. Johnson, Characterization and Optimization of Low Stress PECVD silicon nitride for Production GaAs Manufacturing

J. Thurn and R. F. Cook, Stress hysteresis during thermal cycling of pecvd silicon oxide films, Journal of Applied Physics, vol.91, issue.4, 1988.

L. Rabbia, Nouvelle filière technologique pour micro-commutateurs parallèles capacitifs micro-ondes sur membrane diélectrique, Thèse de doctorat de l, 2005.

N. Fabre and V. Conedera, Techniques de base de micro-fabrication des microsystèmes : Lithographie. Rapport LAAS N°00482, p.62, 2000.

N. Fabre and V. , CONEDERA :Les techniques de photolithographie, Rapport LAAS No04012 ;Techniques de fabrication des microsystèmes 1. Structures et microsystèmes électromécaniques en couches minces, Traité EGEM Electronique, Génie électrique, Microsystèmes, Hermes Science, pp.39-67, 2004.

D. Belharet, P. Dubreuil, D. Colin, L. Mazenq, and H. Granier, Temporary adhesives for wafer bonding: Deep reactive ion etching application Microelectronics and Packaging Conference, pp.1-7, 2009.

K. E. Bean, Anisotropic etching of silicon, IEEE Transactions on Electron Devices, vol.25, issue.10, pp.1185-1193, 1978.
DOI : 10.1109/T-ED.1978.19250

C. Guerret, Effets de la génération, de l'injection et du piégeage des charges électriques sur les propriétés des isolants " ; HDR; Ecole centrale de Lyon ; Mars, 2005.

N. Klein, C. Zuccaro, U. Dahne, H. Schulz, N. Tellmann et al., Dielectric properties of rutile and its use in high temperature superconducting resonators, Journal of Applied Physics, vol.78, issue.11, pp.6683-6686, 1995.
DOI : 10.1063/1.360490

M. E. Tobar, Anisotropic complex permittivity measurements of mono-crystalline rutile between 10 and 300 K, Journal of Applied Physics, vol.83, issue.3, pp.1604-1609, 1998.
DOI : 10.1063/1.366871

M. F. Yan and W. W. Rhodes, Low temperature sintering of TiO, Mater. Sci. Eng, issue.2, pp.6159-66, 1983.

S. B. Cohen, Microwave band pass filters containing high Q dielectric resonators " ; IEEE Microwave Theory and Techniques MTT, pp.16218-227, 1968.

C. Egerton and J. Thomson, Titanium dioxide ceramic composition and hot-pressing method for producing same " ; United States Patent, 1971.

Z. Wing, Permittivity of Porous Titanate Dielectrics, Journal of the American Ceramic Society, vol.81, issue.1, pp.3696-3700, 2006.
DOI : 10.1103/PhysRevB.12.3368

A. Templeton, X. Wang, S. J. Webb, L. F. Cohen, N. Mc et al., Microwave Dielectric Loss of Titanium Oxide, Journal of the American Ceramic Society, vol.80, issue.7, pp.8395-148, 2000.
DOI : 10.1111/j.1151-2916.2000.tb01154.x

F. A. Grant, Properties of Rutile (Titanium Dioxide), Reviews of Modern Physics, vol.31, issue.3, pp.31646-674, 1959.
DOI : 10.1103/RevModPhys.31.646

R. C. Pullar, Dielectric loss caused by oxygen vacancies in titania ceramics, Journal of the European Ceramic Society, vol.29, issue.3, pp.419-424, 2009.
DOI : 10.1016/j.jeurceramsoc.2008.06.019

D. Kim, ???CuO System, Japanese Journal of Applied Physics, vol.39, issue.Part 1, No. 5A, pp.2696-2700, 2000.
DOI : 10.1143/JJAP.39.2696

D. W. Kim, Low-firing of CuO-doped anatase, Materials Research Bulletin, vol.34, issue.5, pp.771-781, 1997.
DOI : 10.1016/S0025-5408(99)00071-9

S. Yoon, Phase analysis and microwave dielectric properties of LTCC TiO2 with glass system, Journal of the European Ceramic Society, vol.23, issue.14, pp.2549-2552, 2003.
DOI : 10.1016/S0955-2219(03)00144-4

C. L. Lo, Low-Temperature Sintering and Microwave Dielectric Properties of Anorthite-Based Glass-Ceramics, Journal of the American Ceramic Society, vol.64, issue.4, pp.2230-2235, 2002.
DOI : 10.1039/b003681l

J. Martin and A. George, Caractérisation expérimentale des matériaux -IIvol. 3 de Traité des matériaux »éd, Presses Polytechniques et Universitaires Romandes, 1998.

M. «. Serge, Micro-stéréolithographie de pièces céramiques complexes » ; Techniques de l'ingénieur ; RE-13

N. D. Delhote, ;. S. Baillargeat, . C. Verdeyme, . C. Delage, and . Chaput, Innovative Shielded High Q Dielectric Resonator Made of Alumina by Layer-by-Layer Stereolithography, IEEE Microwave and Wireless components letters, vol.17, issue.6, 2007.
URL : https://hal.archives-ouvertes.fr/hal-00168850

N. Delhote, Composants céramiques 3D par procédé de stéréolithographie : solutions de filtrage hyperfréquence innovantes, Thèse de doctorat de l, 2007.

J. H. Noh, Microwave dielectric properties of nanocrystalline TiO2 prepared using spark plasma sintering, Journal of the European Ceramic Society, vol.27, issue.8-9, pp.2937-294, 2007.
DOI : 10.1016/j.jeurceramsoc.2006.11.018

A. , *. , R. Bouchet-a, P. Bouvier-b, and P. , Knauth a Hot compaction of nanocrystalline TiO2 (anatase) ceramics. Mechanisms of densification: Grain size and doping effects, Acta Materialia, vol.54, pp.3575-3583, 2006.

A. Weibel, R. Bouchet, R. Denoyel, and P. Knauth, Hot pressing of nanocrystalline TiO2 (anatase) ceramics with controlled microstructure, Journal of the European Ceramic Society, vol.27, issue.7, pp.2641-2646, 2007.
DOI : 10.1016/j.jeurceramsoc.2006.11.073

URL : https://hal.archives-ouvertes.fr/hal-00808352

F. Oudrhiri-hassani and L. Presmanes, Microstructure, porosity and roughness of RF sputtered oxide thin films: Characterization and modelization, Applied Surface Science, vol.254, issue.18, p.254, 2008.
DOI : 10.1016/j.apsusc.2008.03.149

R. Gilles, Dépôt de films nanométriques en pulvérisation cathodique radiofréquence » ; Technique de l'ingénieur, p.610

T. S. Ramu, Y. Narayana, and . Rao, On the Evaluation of Conductivity of Mixtures of Liquid Dielectrics, IEEE Transactions on Electrical Insulation, vol.8, issue.2, pp.55-60, 1973.
DOI : 10.1109/TEI.1973.299263

F. Pierre, Résonateurs diélectriques

F. Chebila, M. M. Jatlaoui, P. Pons, and H. Aubert, Interrogation radar de micro-capteur de presion à transduction électromagnétique " 16èmes, Journées Nationales Microondes, pp.27-29, 2009.

F. Chebila, M. M. Jatlaoui, P. Pons, and H. Aubert, Reconfigurable multi-band scatterers for micro-sensors identification, 2009 IEEE Antennas and Propagation Society International Symposium, pp.1-5, 2009.
DOI : 10.1109/APS.2009.5171704

F. Chebila, M. M. Jatlaoui, P. Pons, and H. Aubert, Pressure measurement from the RADAR interrogation of passive sensors, 2010 IEEE Antennas and Propagation Society International Symposium, p.4, 2010.
DOI : 10.1109/APS.2010.5561726

H. Hallil, F. Chebila, P. Menini, and H. Aubert, Feasibility of passive Gas sensor based on whispering gallery modes and its RADAR interrogation: theoretical and experimental investigations, Sensors & Transducers, vol.116, pp.538-586, 2010.
URL : https://hal.archives-ouvertes.fr/hal-00672671

T. Thai, F. Chebila, M. M. Jatlaoui, P. Pons, H. Aubert et al., A novel passive wireless ultrasensitive RF temperature transducer for remote sensing and identification utilizing radar cross sections variability, p.4, 2010.

T. Thai, F. Chebila, M. M. Jatlaoui, P. Pons, H. Aubert et al., A novel passive wireless ultrasensitive RF temperature transducer for remote sensing and identification utilizing radar cross sections variability, p.4, 2010.