Atomic Force Microscope Control Using aCantilever Model with Two Modes of Resonance
Résumé
The atomic force microscope (AFM) is a nanometric device that can be controlled through the tip of its cantilever,which has never to make contact with the scanned surface. Within this paper, a method that combines two state estimators and PID control is investigated, by considering the AFM exhibits two resonant frequencies. The method performance is compared to other control methods that are addressed in the literature, but when taking into account the AFM is exhibiting one single mode of resonance. The simulations prove that our method has superior performance to the compared ones