SAMs VAPOR DEPOSITION: A READY TO USE FUNCTIONALIZATION TECHNOLOGY FOR MONITORING WETTABILITY PROPERTIES IN MICROFLUIDIC DEVICES

Rémi Courson (1, 2) , Marc Fouet (1, 3) , Pierre Joseph (1, 3) , Fabien Mesnilgrente (1, 2) , Véronique Conédéra (1, 2) , Anne Marie Gué (1, 3)

1 LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
3 LAAS-N2IS - Équipe Nano Ingénierie et Intégration des Systèmes

In this paper, we report the possibility to modify the wettability of polymer microchannels by vapor deposition of Self-Assembled Monolayers. We used silicon dioxide coating to obtain hydrophilic layer and combination of silicon dioxide and 1H,1H,2H,2H-Perfluorodecyltrichlorosilane to create hydrophobic layer.

Mots clés: Hydrophobic; Hydrophilic; SAMs; Vapor phase deposition; Microchannels

Domaines: Matériaux; Chimie inorganique; Micro et nanotechnologies/Microélectronique

Rémi Courson, Marc Fouet, Pierre Joseph, Fabien Mesnilgrente, Véronique Conédéra, et al.. SAMs VAPOR DEPOSITION: A READY TO USE FUNCTIONALIZATION TECHNOLOGY FOR MONITORING WETTABILITY PROPERTIES IN MICROFLUIDIC DEVICES. The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014), Oct 2014, San Antonio, United States. 2014. ⟨hal-01082680⟩