Integrated LC filter on silicon for DC-DC converter applications

Philippe Artillan (1) , Magali Brunet (1) , David Bourrier (2) , Jean-Pierre Laur (1) , Nicolas Mauran (3) , Laurent Bary (3) , Monique Dilhan (2) , Bruno Estibals (1) , Corinne Alonso (1) , Jean-Louis Sanchez (1)

1 LAAS-ISGE - Équipe Intégration de Systèmes de Gestion de l'Énergie
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
3 LAAS-I2C - Service Instrumentation Conception Caractérisation

The integration of passive components on silicon for future DC-DC converters applications is still a challenging area of research. This paper reports the microfabrication of a fully integrated filter containing a spiral inductor on top of a 3D capacitor. A thin magnetic shielding layer is introduced between the two components demonstrating that losses caused by the inductor in the capacitor area are reduced, thus increasing the maximum working frequency of the whole component. The fabricated filter was characterized in a test circuit (buck-type converter).

Mots clés: Integrated circuit fabrication; Electromagnetic induction; Inductors; Capacitors; Energy conversion; Magnetic shielding

Domaines: Micro et nanotechnologies/Microélectronique; Energie électrique

Philippe Artillan, Magali Brunet, David Bourrier, Jean-Pierre Laur, Nicolas Mauran, et al.. Integrated LC filter on silicon for DC-DC converter applications. IEEE Transactions on Power Electronics, 2011, 26 (8), pp.2319-2325. ⟨10.1109/TPEL.2010.2102776⟩. ⟨hal-01443073⟩