Charge injection in thin dielectric layers by atomic force microscopy: influence of geometry and material work function of the AFM tip on the injection process

Christina Villeneuve-Faure (1) , Kremena Makasheva (2) , Laurent Boudou (1) , G. Teyssedre (1)

1 LAPLACE-DSF - Diélectriques Solides et Fiabilité
2 LAPLACE-MPP - Matériaux et Procédés Plasmas

Domaines: Sciences de l'ingénieur [physics]; Physique [physics]

Christina Villeneuve-Faure, Kremena Makasheva, Laurent Boudou, G. Teyssedre. Charge injection in thin dielectric layers by atomic force microscopy: influence of geometry and material work function of the AFM tip on the injection process. Nanotechnology, 2016, 27 (24), pp.245702. ⟨10.1088/0957-4484/27/24/245702⟩. ⟨hal-02448419⟩