Charge injection phenomena at the metal/dielectric interface investigated by Kelvin probe force microscopy

F Mortreuil 1 C. Villeneuve-Faure 1 L. Boudou 1 K. Makasheva 1 G. Teyssedre 1
1 LAPLACE - LAboratoire PLasma et Conversion d'Energie
Abstract : The understanding of charge injection mechanism at metal/dielectric interface is crucial in many applications. A direct probe of such phenomenon requires a charge measurement method whose spatial resolution is compatible with the characteristic scale of phenomena occurring after injection, like charge trapping, and with the geometry of samples under investigation. In this paper, charge injection at metal/dielectric interface and their motion in silicon nitride layer under tunable electric field are probed at nanoscale using a technique derived from Atomic Force Microscopy. This was achieved by realizing embedded lateral electrode structures and using surface potential measurement by Kelvin Probe Force Microscopy (KPFM) to provide voltage, field and charge profiles close to the metal/dielectric interface during and after biasing the electrodes. The influence of electric field enhancement at the interface due to the electrode geometry was accounted for. Electron and hole mobility was estimated from surface potential profiles obtained under polarization. Charge dynamic was investigated during depolarization steps.
Keywords : KPFM Thin dielectric layer Lateral electrodes Charge injection Metal/dielectric interface
Document type :
Journal articles
Complete list of metadatas

Cited literature [33 references]  Display  Hide  Download
https://hal.archives-ouvertes.fr/hal-02324315
Contributor : Kremena Makasheva <>
Submitted on : Friday, November 1, 2019 - 12:31:21 PM
Last modification on : Friday, January 10, 2020 - 9:10:06 PM

File

2017-JPhysD-FMortreuil-final.p...
Files produced by the author(s)

Identifiers

Collections

UNIV-TLSE3 | CNRS

Citation

F Mortreuil, C. Villeneuve-Faure, L. Boudou, K. Makasheva, G. Teyssedre. Charge injection phenomena at the metal/dielectric interface investigated by Kelvin probe force microscopy. Journal of Physics D: Applied Physics, IOP Publishing, 2017, 50 (17), pp.175302. ⟨10.1088/1361-6463/aa665e⟩. ⟨hal-02324315⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

270

Files downloads

38

CONTACT

scd.ao@univ-tlse3.fr